On the thermal stability of thin gold films, obtained by vacuum deposition

Authors

  • Mariya A. Gubina Perm Scientific and Production Instrument-Making Company
  • Alexander M. Minkin Perm Scientific and Production Instrument-Making Company
  • Natalya A. Medvedeva Perm State University

DOI:

https://doi.org/10.17072/2223-1838-2024-4-153-160

Keywords:

thin films, gold films, vacuum deposition, recrystallization, post-firing

Abstract

The article presents the results of a study of the effect of the annealing temperature on the state of the microstructure of thin gold films deposited on the surface of a Q-flex accelerometer sensor (pendulum) obtained by vacuum deposition. It has been established that the quality of substrate surface preparation before deposition of gold filmscan influence the evolution of the microstructure of films during their post-firing.

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Published

2025-03-07

How to Cite

Gubina М. А., Minkin А. М., & Medvedeva Н. А. (2025). On the thermal stability of thin gold films, obtained by vacuum deposition. Bulletin of Perm University. CHEMISTRY, 14(4). https://doi.org/10.17072/2223-1838-2024-4-153-160

Issue

Vol. 14 No. 4 (2024)

Section

Physical chemistry and electrochemistry