Kozlov А.; Salgaeva У.; Zhuravlev В.; Volyntsev А. . The study of the kinetics of thin-film lithium niobate reactive ion etching in a fluorine-containing plasma. Bulletin of Perm University. Physics, [S. l.], n. 1, p. 56–71, 2024. DOI: 10.17072/1994-3598-2024-1-56-71. Disponível em: https://press.psu.ru/index.php/phys/article/view/8816. Acesso em: 17 may. 2024.